Cameca SX50 EMPA

The Cameca SX50 Electron Microprobe (EPMA) is equipped with four wavelength dispersive detectors (WDS) and a PGT energy dispersive system (EDS).  It is used primarily for non-destructive, quantitative chemical analysis.  The EPMA has high sensitivity (0.01 wt % detection limit), high speed (seconds to minutes per analysis), high precision and accuracy (1-2 % errors), and high spatial resolution (0.001 mm analysis area); can be used to obtain images that show the distribution and variation of chemical components in materials.  The integrated optical microscope imaging allows visual selection of specific sample features to analyze.  Solid materials such as alloys, semiconductors, ceramics, borosilicate glasses, rocks, or minerals can be analyzed for major, minor, and trace elements.  The EPMA can analyze all elements in the periodic table above atomic number 4 (Be), including B, C, N, O and F.